Semiconductor device and information processing system including the same

ABSTRACT

A semiconductor device according to the present invention includes plural core chips CC 0  to CC 7  to which mutually different pieces of chip identification information LID are allocated, and an interface chip IF that controls the core chips CC 0  to CC 7 . The interface chip IF receives address information ADD for specifying a memory cell, and supplies in common a part of the address information to the core chips CC 0  to CC 7  as chip selection information SEL to be compared with the chip identification information LID. With this configuration, it appears from a controller that an address space is simply enlarged. Therefore, an interface that is same as that for a conventional semiconductor memory device can be used.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device and aninformation processing system including the same. More particularly, thepresent invention relates to a semiconductor device that includes pluralcore chips and an interface chip to control the cores and an informationprocessing system including the same.

2. Description of the Related Art

A memory capacity that is required in a semiconductor memory device suchas a dynamic random access memory (DRAM) has increased every year. Inrecent years, a memory device that is called a multi-chip package whereplural memory chips are laminated is suggested to satisfy the requiredmemory capacity. However, since the memory chip used in the multi-chippackage is a common memory chip capable of operating even though thememory chip is a single chip, a so-called front end unit that performs afunction of an interface with an external device (for example, memorycontroller) is included in each memory chip. For this reason, an areafor a memory core in each memory chip is restricted to an area obtainedby subtracting the area for the front end unit from a total chip area,and it is difficult to greatly increase a memory capacity for each chip(for each memory chip).

In addition, a circuit that constitutes the front end unit ismanufactured at the same time as a back end unit including a memorycore, regardless of the circuit being a circuit of a logic system.Therefore there have been a further problem that it is difficult tospeed up the front end unit.

As a method to resolve the above problem, a method that integrates thefront end unit and the back end unit in individual chips and laminatesthese chips, thereby constituting one semiconductor memory device, issuggested (for example, Japanese Patent Application Laid-Open (JP-A) No.2007-157266). According to this method, with respect to plural corechips each of which is integrated with the back end unit without thefront end unit, it becomes possible to increase a memory capacity foreach chip (for each core chip) because an occupied area assignable forthe memory core increases. Meanwhile, with respect to an interface chipthat is integrated with the front end unit and is common to the pluralcore chips, it becomes possible to form its circuit with a high-speedtransistor because the interface chip can be manufactured using aprocess different from that of the memory core. In addition, since theplural core chips can be allocated to one interface chip, it becomespossible to provide a semiconductor memory device that has a largememory capacity and a high operation speed as a whole.

However, this kind of semiconductor memory device is recognized as onlyone memory chip, in view of a controller. For this reason, when theplural core chips are allocated to one interface chip, how to perform anindividual access to each core chip becomes a problem. In the case ofthe general multi-chip package, each memory chip is individuallyselected using a dedicated chip selection terminal (/CS) in each memorychip. Meanwhile, in the semiconductor memory device described above,since the chip selection terminal is provided in only the interfacechip, each core chip cannot be individually selected by a chip selectionsignal.

In order to resolve this problem, JP-A No. 2007-157266 described above,a chip identification number is allocated to each core chip, a chipselection address is commonly provided from the interface chip to eachcore chip, and individual selection of each core chip is realized.

However, since the chip selection address that is described in JP-A No.2007-157266 is not used in the common semiconductor memory device,compatibility with the semiconductor memory device according to therelated art may be lost.

As a result of examinations made by the present inventor from the aboveviewpoint, the inventor has found that compatibility with conventionalsemiconductor memory devices can be maintained by using a part ofaddress information for a chip selection signal. According to thisconfiguration, it appears from a controller that an address space issimply enlarged. Therefore, an interface that is same as that for theconventional semiconductor memory devices can be used.

However, in a semiconductor memory device such as a DRAM, there isemployed a system of performing a read operation or a write operation byperforming a row access and a column access in this order. Therefore, apart of address information used as a chip selection signal is suppliedat only one of timings of a row access and a column access. Accordingly,when a chip selection signal is supplied at a row access time, forexample, a chip selection signal is not supplied at a column accesstime. Consequently, it is not possible to determine which one of corechips is selected at the column access time.

This problem of accessing does not occur when each core chip is dividedinto plural memory banks and also when each memory bank is configuredacross plural core chips as viewed from a memory controller. This isbecause a bank address signal for assigning a memory bank is supplied atboth timings of the row access time and the column access time. That is,when chip activation information is held in a predetermined core chipwhen a predetermined memory bank in this predetermined core chip isselected at a row access time, a column access to the predeterminedmemory bank in the predetermined core chip can be performed even when achip selection signal is not supplied at the column access time.

However, in a semiconductor memory device having plural memory banks,two or more memory banks can operate in parallel. Therefore, pieces ofchip activation information can be simultaneously in an active state inplural core chips. Even in this case, an access failure does not occurbecause a bank address signal is supplied at the column access time.That is, in a core chip in which the chip activation information is inan active state, a column access is received regardless of the bankaddress signal. However, because a column access to a memory bank thatis not in an active state becomes invalid, damaging of data or conflictof data does not occur.

However, because an invalid column access increases its powerconsumption, it is preferable to reduce power consumption by preventingsuch a column access. The above problem applies not only to a so-calledsemiconductor memory device such as a DRAM but also to a semiconductordevice in general that includes a memory in a part thereof.

SUMMARY

In one embodiment, there is provided a semiconductor device comprising aplurality of semiconductor chips stacked each other, each of thesemiconductor chips including a plurality of memory banks selectivelyactivated based on a bank address signal, the semiconductor chips beingconnected to each other by penetration electrodes, wherein thesemiconductor chips have mutually different chip identificationinformation, the semiconductor chips receive in common an active commandsignal, the bank address signal, and a chip selection signal via thepenetration electrodes, and each of the semiconductor chips includes abank active register that holds activation information of a memory bankassigned by the bank address signal when the chip selection signal thatis supplied together with the active command signal and the bank addresssignal matches the chip identification information.

In another embodiment, there is provided a semiconductor devicecomprising a plurality of core chips that can perform a read operationor a write operation by performing a row access and a column access inthis order, and an interface chip that controls the core chips, whereineach of the core chips includes a plurality of memory banks selectivelyactivated based on a bank address signal, the core chips have mutuallydifferent chip identification information, the interface chip suppliesin common the bank address signal and a chip selection signal to thecore chips at the row access time, the interface chip supplies in commonthe bank address signal to the core chips at the column access time, outof the core chips, a core chip of which the chip selection signalsupplied at the row access time matches the chip identificationinformation performs a row access to a memory bank assigned by the bankaddress signal and holds activation information showing the memory bank,and out of the core chips, a core chip of which a memory bank shown bythe bank address signal that is supplied at the column access timematches a memory bank shown by the activation information performs acolumn access to a memory bank assigned by the bank address signal.

In still another embodiment, there is provided an information processingsystem comprising: a semiconductor device having a plurality of corechips each including a plurality of memory banks selectively activatedbased on bank address signals and being allocated with mutuallydifferent chip identification information and has an interface chip thatcontrols the core chips; and a controller that controls thesemiconductor device, wherein the controller supplies to the interfacechip first address information including the bank address signal and achip selection signal to be compared with the chip identificationinformation at a row access time, the controller supplies second addressinformation including the bank address signal to the interface chip at acolumn access time, the interface chip supplies in common the firstaddress information to the core chips at the row access time, theinterface chip supplies in common the second address information to thecore chips at the column access time, out of the core chips, a core chipof which the chip selection signal supplied at the row access timematches the chip identification information performs a row access to amemory bank assigned by the bank address signal and holds activationinformation showing the memory bank, and out of the core chips, a corechip of which a memory bank shown by the bank address signal that issupplied at the column access time matches a memory bank shown by theactivation information performs a column access to a memory bankassigned by the bank address signal.

According to the present invention, each semiconductor chip holdsactivation information in each memory bank. Therefore, even when a chipselection signal is not supplied at a column access time, an invalidcolumn access is not performed in a semiconductor chip other than asemiconductor chip to be accessed. Accordingly, the power consumption ofthe semiconductor chip can be reduced.

BRIEF DESCRIPTION OF THE DRAWINGS

The above features and advantages of the present invention will be moreapparent from the following description of certain preferred embodimentstaken in conjunction with the accompanying drawings, in which:

FIG. 1 is a schematic cross-sectional view illustrating the structure ofa semiconductor device according to the preferred embodiment of thepresent invention;

FIGS. 2A to 2C are diagram showing the various types of TSV provided ina core chip;

FIG. 3 is a cross-sectional view illustrating the structure of the TSVof the type shown in FIG. 2A;

FIG. 4 is a block diagram illustrating the circuit Configuration of thesemiconductor memory device;

FIG. 5 is a diagram showing a circuit associated with selection of thecore chips;

FIG. 6 is a table illustrating allocation of an address according to theI/O configuration;

FIG. 7 is another example of a circuit associated with selection of thecore chips, which specifically shows the configuration of the layeraddress comparing circuit;

FIG. 8 is a circuit diagram of the layer address comparing circuit;

FIG. 9 is a block diagram showing a configuration of main parts of thecore chip in more detail;

FIG. 10 is a circuit diagram of the bank active register;

FIG. 11 is a timing diagram for explaining an operation of the controllogic;

FIG. 12 is a schematic diagram for explaining which one of the registercircuits;

FIGS. 13A and 13B are tables illustrating allocation of an addressaccording to the I/O configuration, when the defective chip exists; and

FIG. 14 is a diagram showing the configuration of a data processingsystem using the semiconductor memory device according to thisembodiment.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Preferred embodiments of the present invention will be explained belowin detail with reference to the accompanying drawings.

FIG. 1 is a schematic cross-sectional view provided to explain thestructure of a semiconductor device 10 according to the preferredembodiment of the present invention.

As shown in FIG. 1, the semiconductor device 10 according to thisembodiment has the structure where 8 core chips CC0 to CC7 that have thesame function and structure and are manufactured using the samemanufacture mask, an interface chip IF that is manufactured using amanufacture mask different from that of the core chips and an interposerIP are laminated. The core chips CC0 to CC7 and the interface chip IFare semiconductor chips using a silicon substrate and are electricallyconnected to adjacent chips in a vertical direction through pluralThrough Silicon Vias (TSV) penetrating the silicon substrate. Meanwhile,the interposer IP is a circuit board that is made of a resin, and pluralexternal terminals (solder balls) SB are formed in a back surface IPb ofthe interposer IP.

Each of the core chips CC0 to CC7 is a semiconductor chip which consistsof circuit blocks other than a so-called front end unit (front endfunction) performing a function of an interface with an external devicethrough an external terminal among circuit blocks included in a 1 GbDDR3 (Double Data Rate 3)-type SDRAM (Synchronous Dynamic Random AccessMemory). The SDRAM is a well-known and common memory chip that includesthe front end unit and a so-called back end unit having a plural memorycells and accessing to the memory cells. The SDRAM operates even as asingle chip and is capable to communicate directly with a memorycontroller. That is, each of the core chips CC0 to CC7 is asemiconductor chip where only the circuit blocks belonging to the backend unit are integrated in principle. As the circuit blocks that areincluded in the front end unit, a parallel-serial converting circuit(data latch circuit) that performs parallel/serial conversion oninput/output data between a memory cell array and a data input/outputterminal and a DLL (Delay Locked Loop) circuit that controlsinput/output timing of data are exemplified, which will be described indetail below. The interface chip IF is a semiconductor chip in whichonly the front end unit is integrated. Accordingly, an operationfrequency of the interface chip is higher than an operation frequency ofthe core chip. Since the circuits that belong to the front end unit arenot included in the core chips CC0 to CC7, the core chips CC0 to CC7cannot be operated as the single chips, except for when the core chipsare operated in a wafer state for a test operation in the course ofmanufacturing the core chips. The interface chip IF is needed to operatethe core chips CC0 to CC7. Accordingly, the memory integration of thecore chips is denser than the memory integration of a general singlechip. The interface chip IF has a front end function for communicatingwith the external device at a first operation frequency, and the pluralcore chips CC0 to CC7 have a back end function for communicating withonly the interface chip IF at a second operation frequency lower thanthe first operation frequency. Accordingly, each of the plural corechips includes a memory cell array that stores plural information, and abit number of plural read data for each I/O (DQ) that are supplied fromthe plural core chips to the interface chip in parallel is plural andassociated with a one-time read command provided from the interface chipto the core chips. In this case, the plural bit number corresponds to aprefetch data number to be well-known.

The interface chip IF functions as a common front end unit for the eightcore chips CC0 to CC7. Accordingly, all external accesses are performedthrough the interface chip IF and inputs/outputs of data are alsoperformed through the interface chip IF. In this embodiment, theinterface chip IF is disposed between the interposer IP and the corechips CC0 to CC7. However, the position of the interface chip IF is notrestricted in particular, and the interface chip IF may be disposed onthe core chips CC0 to CC7 and may be disposed on the back surface IPb ofthe interposer IP. When the interface chip IF is disposed on the corechips CC0 to CC7 in a face-down manner or is disposed on the backsurface IPb of the interposer IP in a face-up manner, the TSV does notneed to be provided in the interface chip IF. The interface chip IF maybe disposed to be interposed between the two interposers IP.

The interposer IP functions as a rewiring substrate to increase anelectrode pitch and secures mechanical strength of the semiconductordevice 10. That is, an electrode 91 that is formed on a top surface IPaof the interposer IP is drawn to the back surface IPb via a through-holeelectrode 92 and the pitch of the external terminals SB is enlarged bythe rewiring layer 93 provided on the back surface IPb. In FIG. 1, onlythe two external terminals SB are shown. In actuality, however, three ormore external terminals are provided. The layout of the externalterminals SB is the same as that of the DDR3-type SDRAM that isdetermined by the regulation. Accordingly, the semiconductor memorydevice can be treated as one DDR3-type SDRAM from the externalcontroller.

As shown in FIG. 1, a top surface of the uppermost core chip CC0 iscovered by an NCF (Non-Conductive Film) 94 and a lead frame 95. Gapsbetween the core chips CC0 to CC7 and the interface chip IF are filledwith an underfill 96 and surrounding portions of the gaps are covered bya sealing resin 97. Thereby, the individual chips are physicallyprotected.

When most of the TSVs provided in the core chips CC0 to CC7 aretwo-dimensionally viewed from a lamination direction, that is, viewedfrom an arrow A shown in FIG. 1, the TSVs are short-circuited from theTSVs of other layers provided at the same position. That is, as shown inFIG. 2A, the vertically disposed TSV1 s that are provided at the sameposition in plain view are short-circuited, and one wiring line isconfigured by the TSV1. The TSV1 that are provided in the core chips CC0to CC7 are connected to internal circuits in the core chips,respectively. Accordingly, input signals (command signal, addresssignal, etc.) that are supplied from the interface chip IF to the TSV1 sshown in FIG. 2A are commonly input to the internal circuits 4 of thecore chips CC0 to CC7. Output signals (data etc.) that are supplied fromthe core chips CC0 to CC7 to the TSV1 are wired-ORed and input to theinterface chip IF.

Meanwhile, as shown in FIG. 2B, the a part of TSVs are not directlyconnected to the TSV2 of other layers provided at the same position inplain view but are connected to the TSV2 of other layers through theinternal circuits 5 provided in the core chips CC0 to CC7. That is, theinternal circuits that are provided in the core chips CC0 to CC7 arecascade-connected through the TSV2. This kind of TSV2 is used tosequentially transmit predetermined information to the internal circuits5 provided in the core chips CC0 to CC7. As this information, layeraddress information to be described below is exemplified.

Another TSV group is short-circuited from the TSVs of other layerprovided at the different position in plan view, as shown in FIG. 2C.With respect to this kind of TSV group 3, internal circuits 6 of thecore chips CC0 to CC7 are connected to the TSV3 a provided at thepredetermined position P in plain view. Thereby, information can beselectively input to the internal circuits 6 provided in the core chips.As this information, defective chip information to be described below isexemplified.

As such, as types of the TSVs provided in the core chips CC0 to CC7,three types (TSV1 to TSV3) shown in FIGS. 2A to 2C exist. As describedabove, most of the TSVs are of a type shown in FIG. 2A, and an addresssignal, a command signal, and a clock signal are supplied from theinterface chip IF to the core chips CC0 to CC7, through the TSV1 of thetype shown in FIG. 2A. Read data and write data are input to and outputfrom the interface chip IF through the TSV1 of the type shown in FIG.2A. Meanwhile, the TSV2 and TSV3 of the types shown in FIGS. 2B and 2Care used to provide individual information to the core chips CC0 to CC7having the same structure.

FIG. 3 is a cross-sectional view illustrating the structure of the TSV1of the type shown in FIG. 2A.

As shown in FIG. 3, the TSV1 is provided to penetrate a siliconsubstrate 80 and an interlayer insulating film 81 provided on a surfaceof the silicon substrate 80. Around the TSV1, an insulating ring 82 isprovided. Thereby, the TSV1 and a transistor region are insulated fromeach other. In an example shown in FIG. 3, the insulating ring 82 isprovided double. Thereby, capacitance between the TSV1 and the siliconsubstrate 80 is reduced.

An end 83 of the TSV1 at the back surface of the silicon substrate 80 iscovered by a back surface bump 84. The back surface bump 84 is anelectrode that contacts a surface bump 85 provided in a core chip of alower layer. The surface bump 85 is connected to an end 86 of the TSV1,through plural pads P0 to P3 provided in wiring layers L0 to L3 andplural through-hole electrodes TH1 to TH3 connecting the pads to eachother. Thereby, the surface bump 85 and the back surface bump 84 thatare provided at the same position in plain view are short-circuited.Connection with internal circuits (not shown in the drawings) isperformed through internal wiring lines (not shown in the drawings)drawn from the pads P0 to P3 provided in the wiring layers L0 to L3.

FIG. 4 is a block diagram illustrating the circuit configuration of thesemiconductor memory device 10.

As shown in FIG. 4, the external terminals that are provided in theinterposer IP include clock terminals 11 a and 11 b, an clock enableterminal 11 c, command terminals 12 a to 12 e, an address terminal 13, adata input/output terminal 14, data strobe terminals 15 a and 15 b, acalibration terminal 16, and power supply terminals 17 a and 17 b. Allof the external terminals are connected to the interface chip IF and arenot directly connected to the core chips CC0 to CC7, except for thepower supply terminals 17 a and 17 b.

First, a connection relationship between the external terminals and theinterface chip IF performing the front end function and the circuitconfiguration of the interface chip IF will be described.

The clock terminals 11 a and 11 b are supplied with external clocksignals CK and /CK, respectively, and the clock enable terminal 11 c issupplied with a clock enable signal CKE. The external clock signals CKand /CK and the clock enable signal CKE are supplied to a clockgenerating circuit 21 provided in the interface chip IF. A signal where“/” is added to a head of a signal name in this specification indicatesan inversion signal of a corresponding signal or a low-active signal.Accordingly, the external clock signals CK and /CK are complementarysignals. The clock generating circuit 21 generates an internal clocksignal ICLK, and the generated internal clock signal ICLK is supplied tovarious circuit blocks in the interface chip IF and is commonly suppliedto the core chips CC0 to CC7 through the TSVs.

A DLL circuit 22 is included in the interface chip IF and aninput/output clock signal LCLK is generated by the DLL circuit 22. Theinput/output clock signal LCLK is supplied to an input/output buffercircuit 23 included in the interface chip IF. A DLL function is used tocontrol the front end unit by using the signal LCLK synchronized with asignal of the external device, when the semiconductor memory device 10communicates with the external device. Accordingly, DLL function is notneeded for the core chips CC0 to CC7 as the back end.

The command terminals 12 a to 12 e are supplied with a row-addressstrobe signal /RAS, a column address strobe signal /CAS, a write enablesignal /WE, a chip select signal /CS, and an on-die termination signalODT. These command signals are supplied to a command input buffer 31that is provided in the interface chip IF. The command signals suppliedto the command input buffer 31 are further supplied to a command decoder32. The command decoder 32 is a circuit that holds, decodes, and countsthe command signals in synchronization with the internal clock ICLK andgenerates various internal commands ICMD. The generated internal commandICMD is supplied to the various circuit blocks in the interface chip IFand is commonly supplied to the core chips CC0 to CC7 through the TSVs.

The address terminal 13 is a terminal to which address signals A0 to A15and BA0 to BA2 are supplied, and the supplied address signals A0 to A15and BA0 to BA2 are supplied to an address input buffer 41 provided inthe interface chip IF. An output of the address input buffer 41 iscommonly supplied to the core chips CC0 to CC7 through the TSVs. Theaddress signals A0 to A15 are supplied to a mode register 42 provided inthe interface chip IF, when the semiconductor memory device 10 enters amode register set. The address signals BA0 to BA2 (bank addresses) aredecoded by an address decoder (not shown in the drawings) provided inthe interface chip IF, and a bank selection signal B that is obtained bythe decoding is supplied to a data latch circuit 25. This is becausebank selection of the write data is performed in the interface chip IF.

The data input/output terminal 14 is used to input/output read data orwrite data DQ0 to DQ15. The data strobe terminals 15 a and 15 b areterminals that are used to input/output strobe signals DQS and /DQS. Thedata input/output terminal 14 and the data strobe terminals 15 a and 15b are connected to the input/output buffer circuit 23 provided in theinterface chip IF. The input/output buffer circuit 23 includes an inputbuffer IB and an output buffer OB, and inputs/outputs the read data orthe write data DQ0 to DQ15 and the strobe signals DQS and /DQS insynchronization with the input/output clock signal LCLK supplied fromthe DLL circuit 22. If an internal on-die termination signal IODT issupplied from the command decoder 32, the input/output buffer circuit 23causes the output buffer OB to function as a termination resistor. Animpedance code DRZQ is supplied from the calibration circuit 24 to theinput/output buffer circuit 23. Thereby, impedance of the output bufferOB is designated. The input/output buffer circuit 23 includes awell-known FIFO circuit.

The calibration circuit 24 includes a replica buffer RB that has thesame circuit configuration as the output buffer OB. If the calibrationsignal ZQ is supplied from the command decoder 32, the calibrationcircuit 24 refers to a resistance value of an external resistor (notshown in the drawings) connected to the calibration terminal 16 andperforms a calibration operation. The calibration operation is anoperation for matching the impedance of the replica buffer RB with theresistance value of the external resistor, and the obtained impedancecode DRZQ is supplied to the input/output buffer circuit 23. Thereby,the impedance of the output buffer OB is adjusted to a desired value.

The input/output buffer circuit 23 is connected to a data latch circuit25. The data latch circuit 25 includes a FIFO circuit (not shown in thedrawings) that realizes a FIFO function which operates by latencycontrol realizing the well-known DDR function and a multiplexer MUX (notshown in the drawings). The input/output buffer circuit 23 convertsparallel read data, which is supplied from the core chips CC0 to CC7,into serial read data, and converts serial write data, which is suppliedfrom the input/output buffer, into parallel write data. Accordingly, thedata latch circuit 25 and the input/output buffer circuit 23 areconnected in serial and the data latch circuit 25 and the core chips CC0to CC7 are connected in parallel. In this embodiment, each of the corechips CC0 to CC7 is the back end unit of the DDR3-type SDRAM and aprefetch number is 8 bits. The data latch circuit 25 and each banks ofthe core chips CC0 to CC7 are connected respectively, and the number ofbanks that are included in each of the core chips CC0 to CC7 is 8.Accordingly, connection of the data latch circuit 25 and the core chipsCC0 to CC7 becomes 64 bits (8 bits×8 banks) for each DQ.

Parallel data, not converted into serial data, is basically transferredbetween the data latch circuit 25 and the core chips CC0 to CC7. Thatis, the number of bits of unit internal data simultaneously input/outputbetween each of the core chips CC0 to CC7 and the interface chip IF islarger than the number of bits of unit external data simultaneouslyinput/output between the interface chip IF and outside. That is, thedata latch circuit 25 functions to convert serial unit external datainto parallel unit internal data, and to convert parallel unit internaldata into serial unit external data.

That is, in a common SDRAM (in the SDRAM, a front end unit and a backend unit are constructed in one chip), between the outside of the chipand the SDRAM, data is input/output in serial (that is, the number ofdata input/output terminals is one for each DQ). However, in the corechips CC0 to CC7, an input/output of data between the interface chip IFand the core chips is performed in parallel. This point is the importantdifference between the common SDRAM and the core chips CC0 to CC7.However, all of the prefetched parallel data do not need to beinput/output using the different TSVs, and partial parallel/serialconversion may be performed in the core chips CC0 to CC7 and the numberof TSVs that are needed for each DQ may be reduced. For example, all ofdata of 64 bits for each DQ do not need to be input/output using thedifferent TSVs, and 2-bit parallel/serial conversion may be performed inthe core chips CC0 to CC7 and the number of TSVs that are needed foreach DQ may be reduced to ½ (32).

To the data latch circuit 25, a function for enabling a test in aninterface chip unit is added. The interface chip does not have the backend unit. For this reason, the interface chip cannot be operated as asingle chip in principle. However, if the interface chip never operatesas the single chip, an operation test of the interface chip in a waferstate may not be performed. This means that the semiconductor memorydevice 10 cannot be tested in case an assembly process of the interfacechip and the plural core chips is not executed, and the interface chipis tested by testing the semiconductor memory device 10. In this case,when a defect that cannot be recovered exists in the interface chip, theentire semiconductor memory device 10 is not available. In considerationof this point, in this embodiment, a portion of a pseudo back end unitfor a test is provided in the data latch circuit 25, and a simple memoryfunction is enabled at the time of a test.

The power supply terminals 17 a and 17 b are terminals to which powersupply potentials VDD and VSS are supplied, respectively. The powersupply terminals 17 a and 17 b are connected to a power-on detectingcircuit 43 provided in the interface chip IF and are also connected tothe core chips CC0 to CC7 through the TSVs. The power-on detectingcircuit 43 detects the supply of power. On detecting the supply ofpower, the power-on detecting circuit 43 activates a layer addresscontrol circuit 45 on the interface chip IF.

The layer address control circuit 45 changes a layer address due to theI/O configuration of the semiconductor device 10 according to thepresent embodiment. As described above, the semiconductor memory device10 includes 16 data input/output terminals 14. Thereby, a maximum I/Onumber can be set to 16 bits (DQ0 to DQ15). However, the I/O number isnot fixed to 16 bits and may be set to 8 bits (DQ0 to DQ7) or 4 bits(DQ0 to DQ3). The address allocation is changed according to the I/Onumber and the layer address is also changed. The layer address controlcircuit 45 changes the address allocation according to the I/O numberand is commonly connected to the core chips CC0 to CC7 through the TSVs.

The interface chip IF is also provided with a layer address settingcircuit 44. The layer address setting circuit 44 is connected to thecore chips CC0 to CC7 through the TSVs. The layer address settingcircuit 44 is cascade-connected to the layer address generating circuit46 of the core chips CC0 to CC7 using the TSV2 of the type shown in FIG.2B, and reads out the layer addresses set to the core chips CC0 to CC7at testing.

The interface chip IF is also provided with a defective chip informationholding circuit 33. When a defective core chip that does not normallyoperates is discovered after an assembly, the defective chip informationholding circuit 33 holds its chip number. The defective chip informationholding circuit 33 is connected to the core chips CC0 to CC7 through theTSVs. The defective chip information holding circuit 33 is connected tothe core chips CC0 to CC7 while being shifted, using the TSV3 of thetype shown in FIG. 2C.

The above description is the outline of the connection relationshipbetween the external terminals and the interface chip IF and the circuitconfiguration of the interface chip IF. Next, the circuit configurationof the core chips CC0 to CC7 will be described. The core chips CC0 toCC7 are chips on which a read operation or a write operation can beperformed by performing a row access and a column access in this order.

As shown in FIG. 4, memory cell arrays 50 that are included in the corechips CC0 to CC7 performing the back end function are divided into eightbanks. A bank is a unit that can individually receive a command. Thatis, the individual banks can be independently and nonexclusivelycontrolled. From the outside of the semiconductor memory device 10, eachback can be independently accessed. For example, a part of the memorycell array 50 belonging to the bank 1 and another part of the memorycell array 50 belonging to the bank 2 are controlled nonexclusively.That is, word lines WL and bit lines BL corresponding to each banksrespectively are independently accessed at same period by differentcommands one another. For example, while the bank 1 is maintained to beactive (the word lines and the bit lines are controlled to be active),the bank 2 can be controlled to be active. However, the externalterminals (for example, plural control terminals and plural I/Oterminals) of the semiconductor memory device 10 are shared. In thememory cell array 50, the plural word lines WL and the plural bit linesBL intersect each other, and memory cells MC are disposed atintersections thereof (in FIG. 4, only one word line WL, one bit lineBL, and one memory cell MC are shown). The word line WL is selected by arow decoder 51. The bit line BL is connected to a corresponding senseamplifier SA in a sense circuit 53. The sense amplifier SA is selectedby a column decoder 52.

The row decoder 51 is controlled by a row address supplied from a rowcontrol circuit 61. The row control circuit 61 includes an addressbuffer 61 a that receives a row address supplied from the interface chipIF through the TSV, and the row address that is buffered by the addressbuffer 61 a is supplied to the row decoder 51. The address signal thatis supplied through the TSV is supplied to the row control circuit 61through the input buffer B1. The row control circuit 61 also includes arefresh counter 61 b. When a refresh signal is issued by a control logiccircuit 63, a row address that is indicated by the refresh counter 61 bis supplied to the row decoder 51.

The column decoder 52 is controlled by a column address supplied from acolumn control circuit 62. The column control circuit 62 includes anaddress buffer 62 a that receives the column address supplied from theinterface chip IF through the TSV, and the column address that isbuffered by the address buffer 62 a is supplied to the column decoder52. The column control circuit 62 also includes a burst counter 62 bthat counts the burst length.

The sense amplifier SA selected by the column decoder 52 is connected tothe data control circuit 54 through some amplifiers (sub-amplifiers ordata amplifiers or the like) which are not shown in the drawings.Thereby, read data of 8 bits (=prefetch number) for each I/O (DQ) isoutput from the data control circuit 54 at reading, and write data of 8bits is input to the data control circuit 54 at writing. The datacontrol circuit 54 and the interface chip IF are connected in parallelthrough the TSV.

The control logic circuit 63 receives an internal command ICMD suppliedfrom the interface chip IF through the TSV and controls the row controlcircuit 61 and the column control circuit 62, based on the internalcommand ICMD. The control logic circuit 63 is connected to a layeraddress comparing circuit (chip information comparing circuit) 47. Thelayer address comparing circuit 47 detects whether the correspondingcore chip is target of access, and the detection is performed bycomparing a SEL (chip selection information) which is a part of theaddress signal supplied from the interface chip IF through the TSV and alayer address LID (chip identification information) set to the layeraddress generating circuit 46.

In the layer address generating circuit 46, unique layer addresses areset to the core chips CC0 to CC7, respectively, at initialization. Amethod of setting the layer addresses is as follows. First, after thesemiconductor memory device 10 is initialized, a minimum value (0, 0, 0)as an initial value is set to the layer address generating circuits 46of the core chips CC0 to CC7. The layer address generating circuits 46of the core chips CC0 to CC7 are cascade-connected using the TSVs of thetype shown in FIG. 2B, and have increment circuits provided therein. Thelayer address (0, 0, 0) that is set to the layer address generatingcircuit 46 of the core chip CC0 of the uppermost layer is transmitted tothe layer address generating circuit 46 of the second core chip CC1through the TSV and is incremented. As a result, a different layeraddress (0, 0, 1) is generated. Hereinafter, in the same way as theabove case, the generated layer addresses are transmitted to the corechips of the lower layers and the layer address generating circuits 46in the core chips increment the transmitted layer addresses. A maximumvalue (1, 1, 1) as a layer address is set to the layer addressgenerating circuit 46 of the core chip CC7 of the lowermost layer.Thereby, the unique layer addresses are set to the core chips CC0 toCC7, respectively.

The layer address generating circuit 46 is provided with a defectivechip signal DEF supplied from the defective chip information holdingcircuit 33 of the interface chip IF, through the TSV. As the defectivechip signal DEF is supplied to the individual core chips CC0 to CC7using the TSV3 of the type shown in FIG. 2C, the defective chip signalsDEF can be supplied to the core chips CC0 to CC7, individually. Thedefective chip signal DEF is activated when the corresponding core chipis a defective chip. When the defective chip signal DEF is activated,the layer address generating circuit 46 transmits, to the core chip ofthe lower layer, a non-incremented layer address, not an incrementedlayer address. The defective chip signal DEF is also supplied to thecontrol logic circuit 63. When the defective chip signal DEF isactivated, the control logic circuit 63 is completely halted. Thereby,the defective core chip performs neither read operation nor writeoperation, even though an address signal or a command signal is inputfrom the interface chip IF.

An output of the control logic circuit 63 is also supplied to a moderegister 64. When an output of the control logic circuit 63 shows a moderegister set, the mode register 64 is updated by an address signal.Thereby, operation modes of the core chips CC0 to CC7 are set.

Each of the core chips CC0 to CC7 has an internal voltage generatingcircuit 70. The internal voltage generating circuit 70 is provided withpower supply potentials VDD and VSS. The internal voltage generatingcircuit 70 receives these power supply potentials and generates variousinternal voltages. As the internal voltages that are generated by theinternal voltage generating circuit 70, an internal voltage VPERI (≈VDD)for operation power of various peripheral circuits, an internal voltageVARY (<VDD) for an array voltage of the memory cell array 50, and aninternal voltage VPP (>VDD) for an activation potential of the word lineWL are included. In each of the core chips CC0 to CC7, a power-ondetecting circuit 71 is also provided. When the supply of power isdetected, the power-on detecting circuit 71 resets various internalcircuits.

The peripheral circuits in the core chips CC0 to CC7 operates insynchronization with the internal clock signal ICLK that is suppliedform the interface chip IF through the TSV. The internal clock signalICLK supplied through the TSV is supplied to the various peripheralcircuits through the input buffer B2.

The above description is the basic circuit configuration of the corechips CC0 to CC7. In the core chips CC0 to CC7, the front end unit foran interface with the external device is not provided. Therefore thecore chip cannot operate as a single chip in principle. However, if thecore chip never operates as the single chip, an operation test of thecore chip in a wafer state may not be performed. This means that thesemiconductor memory device 10 cannot be tested, before the interfacechip and the plural core chips are fully assembled. In other words, theindividual core chips are tested when testing the semiconductor memorydevice 10. When unrecoverable defect exists in the core chips, theentire semiconductor memory device 10 is led to be unavailable. In thisembodiment, in the core chips CC0 to CC7, a portion of a pseudo frontend unit, for testing, that includes some test pads TP and a test frontend unit of a test command decoder 65 is provided, and an address signaland test data or a command signal can be input from the test pads TP. Itis noted that the test front end unit is provided for a simple test in awafer test, and does not have all of the front end functions in theinterface chip. For example, since an operation frequency of the corechips is lower than an operation frequency of the front end unit, thetest front end unit can be simply realized with a circuit that performsa test with a low frequency.

Kinds of the test pads TP are almost the same as those of the externalterminals provided in the interposer IP. Specifically, the test padsincludes a test pad TP1 to which a clock signal is input, a test pad TP2to which an address signal is input, a test pad TP3 to which a commandsignal is input, a test pad TP4 for input/output test data, a test padTP5 for input/output a data strobe signal, and a test pad TP6 for apower supply potential.

A common external command (not decoded) is input at testing. Therefore,the test command decoder 65 is also provided in each of the core chipsCC0 to CC7. Because serial test data is input and output at testing, atest input/output circuit 55 is also provided in each of the core chipsCC0 to CC7.

This is the entire configuration of the semiconductor memory device 10.Because in the semiconductor memory device 10, the 8 core chips of 1 Gbare laminated, the semiconductor memory device 10 has a memory capacityof 8 Gb in total. Because the chip selection signal /CS is input to oneterminal (chip selection terminal), the semiconductor memory device isrecognized as a single DRAM having the memory capacity of 8 Gb, in viewof the controller.

FIG. 5 is a diagram showing a circuit associated with selection of thecore chips CC0 to CC7.

As shown in FIG. 5, the layer address generating circuits 46 areprovided in the core chips CC0 to CC7, respectively, and arecascade-connected through the TSV2 of the type shown in FIG. 2B. Thelayer address generating circuit 46 includes a layer address register 46a, an increment circuit 46 b, and a transmission circuit 46 c.

The layer address register 46 a holds a layer address (chipidentification information) LID of 3 bits. When the power supply isdetected by the power-on detecting circuit 71 shown in FIG. 4, aregister value is initialized to a minimum value (0, 0, 0). In the corechip CC0 of the uppermost layer, the increment circuit 46 b incrementsan layer address LID (0, 0, 0) in the layer address register 46 a andthe incremented value (0, 0, 1) is transmitted to the core chip CC1 ofthe lower layer by the transmission circuit 46 c. A transmitted layeraddress LID (0, 0, 1) is set to the layer address register 46 a of thecore chip CC1.

Even in the core chip CC1, a value (0, 1, 0) that is obtained byincrementing the layer address LID (0, 0, 1) in the layer addressregister 46 a by the increment circuit 46 b is transmitted to the corechip CC2 of the lower layer by the transmission circuit 46 c.

Hereinafter, in the same way as the above case, the incremented layeraddresses LID are sequentially transmitted to the core chips of thelower layers. Finally, a maximum value (1, 1, 1) is set to the layeraddress register 46 a of the core chip CC7 of the lowermost layer.Thereby, each of the core chips CC0 to CC7 has a unique layer addressLID.

A defective chip signal DEF is supplied from the defective chipinformation holding circuit 33 of the interface chip IF to the layeraddress generating circuit 46 through the TSV3 of the type shown in FIG.2C. The defective chip signal DEF is a signal of 8 bits and the bits aresupplied to the corresponding core chips CC0 to CC7. The core chip wherethe corresponding bits of the defective chip signal DEF is activated isthe defective chip. In the core chip where the corresponding bits of thedefective chip signal DEF is activated, the transmission circuit 46 ctransmits, to the core chip of the lower layer, a non-incremented layeraddress LID, not an incremented layer address LID. In other words, theLID allocating of defective chip is skipped. That is, the layer addressLID that is allocated to each of the core chips CC0 to CC7 is not fixedand changes according to the defective chip signal DEF. The same layeraddress LID as the lower layer is allocated to the defective chip.However, since the control logic circuit 63 is prohibited from beingactivated in the defective chip, a read operation or a write operationis not securely performed, even though an address signal or a commandsignal is input from the interface chip IF.

The layer address LID is further supplied to the layer address comparingcircuit (chip information comparing circuit) 47 in each of the corechips CC0 to CC7. The layer address comparing circuit 47 compares thelayer address LID (chip identification information) supplied from thelayer address generating circuit 46 and a portion of the address signal(chip selection information SEL) supplied from the interface chip IFthrough the TSV. As the address signal is commonly supplied to the corechips CC0 to CC7 through the TSV1 of the type shown in FIG. 2A, the corechip where matching is detected as a comparison result by the layeraddress comparing circuit 47 is only one.

The address signal supplied form the interface chip IF includes a rowaddress and a column address, and the row address and the column addressare supplied to the core chips CC0 to CC7 in order of the row addressand the column address. Accordingly, when the all of chip selectioninformation SEL is included in the row address, the comparison operationis completed when the row address is input. Meanwhile, when a portion ofthe chip selection information SEL is included in the row address and aremaining portion of the chip selection information SEL is included inthe column address, the comparison operation is not completed when therow address is input and is completed when the column address is input.

A portion of the address signal that is used as the chip selectioninformation SEL depends on the I/O configuration. That is, the chipselection information SEL is not fixed and changes according to the I/Oconfiguration. In this case, the I/O configuration indicates theconfiguration of the number of bits of external unit data that issimultaneously input and output between the semiconductor memory deviceand the external device. In this embodiment, the 16-bit configuration(DQ0 to DQ15), the 8-bit configuration (DQ0 to DQ7), and the 4-bitconfiguration (DQ0 to DQ3) can be selected. The I/O configuration can beselected by fuse cutting or a bonding option.

FIG. 6 is a table illustrating allocation of an address according to theI/O configuration.

As shown in FIG. 6, when the 16-bit configuration (16DQ) is selected,bits A0 to A15 of an address signal are used as row addresses X0 to X15and the bits A0 to A9 are used as column addresses Y0 to Y9. Among them,the row addresses X13 to X15 are used as the chip selection informationSEL. Accordingly, when the 16-bit configuration (16DQ) is selected, thechip selection information SEL is fixed at inputting the row address.

When the 8-bit configuration (8DQ) is selected, the bits A0 to A15 ofthe address signal are used as the row addresses x0 to X15 and the bitsA0 to A9 and A11 are used as the column addresses Y0 to Y9 and Y11.Among them, the row addresses X14 and X15 and the column address Y11 areused as the chip selection information SEL. When the 4-bit configuration(4DQ) is selected, the bits A0 to A15 of the address signal are used asthe row addresses X0 to X15 and the bits A0 to A9, A11, and A13 are usedas the column addresses Y0 to Y9, Y11, and Y13. Among them, the rowaddresses X14 and X15 and the column address Y13 are used as the chipselection information SEL. Accordingly, when the 8-bit configuration(8DQ) or the 4-bit configuration (4DQ), the chip selection informationSEL is not fixed before both the row address and the column address areinput.

Referring back to FIG. 5, the layer address control circuit 45 uses adesignation signal SET to designate a portion of the address signal usedas the chip selection information SEL, according to the selected I/Oconfiguration. The designation signal SET is commonly supplied to thelayer address comparing circuits 47 of the core chips CC0 to CC7 throughthe TSVs. The layer address comparing circuit 47 compares the layeraddress LID supplied from the layer address generating circuit 46 andthe chip selection information SEL supplied from the interface chip IFand activates a matching signal HIT, when the layer address LID and thechip selection information SEL are matched with each other. The matchingsignal HIT is supplied to the control logic circuit 63 in thecorresponding core chip. The control logic circuit 63 is activated bythe matching signal HIT and validates internal commands ICMD that aresupplied from the interface chip IF through the TSV. Among the validatedinternal commands, an internal row command IRC is supplied to the rowcontrol circuit 61 shown in FIG. 1 and an internal column command ICC issupplied to the column control circuit 62 shown in FIG. 1. In case thematching signal HIT is not activated, the control logic circuit 63invalidates the internal commands ICMD. Accordingly, the internalcommands ICMD that are commonly supplied to the core chips CC0 to CC7are validated in any one of the core chips CC0 to CC7.

FIG. 7 shows another example of a circuit associated with selection ofthe core chips CC0 to CC7, which specifically shows the configuration ofthe layer address comparing circuit 47.

As shown in FIG. 7, the layer address comparing circuit 47 includes alayer address selecting circuit 47 a, a row address comparing circuit 47x, and a column address comparing circuit 47 y. The layer addressselecting circuit 47 a receives the designation signal SET and selects aportion of an address signal ADD to be supplied to the row addresscomparing circuit 47 x and/or the column address comparing circuit 47 y.As described above, the designation signal SET is supplied from thelayer address control circuit 45, on the basis of the I/O configuration.

The row address that is selected by the layer address selecting circuit47 a is supplied to the row address comparing circuit 47 x together withthe corresponding bits of the layer address LID. The row addresscomparing circuit 47 x compares the row address and the correspondingbits and activates a matching signal HITX, when the bits of the rowaddress and the corresponding bits are perfectly matched with eachother. Likewise, the column address that is selected by the layeraddress selecting circuit 47 a is supplied to the column addresscomparing circuit 47 y together with the corresponding bits of the layeraddress LID. The column address comparing circuit 47 y compares thecolumn address and the corresponding bits and activates a matchingsignal HITY, when the bits of the column address and the correspondingbits are perfectly matched with each other. The matching signals HITXand HITY are supplied to the control logic circuit 63.

FIG. 8 is a circuit diagram of the layer address comparing circuit 47.

As shown in FIG. 8, the bits A11 and A13 to A15 of the address signaland the bits LID0 to LID2 of the layer address LID are supplied to thelayer address selecting circuit 47 a, and the path for outputting thesesignals are switched by the designation signal SET.

Specifically, when the designation signal SET shows the 16-bitconfiguration (16DQ), the bits A13 to A15 of the address signal areoutput as output signals AX0 to AX2, respectively, and the bits LID0 toLID2 of the layer address LID are output as output signals LIDX0 toLIDX2, respectively. When the designation signal SET shows the 8-bitconfiguration (8DQ), the bits A14, A15, and A11 of the address signalare output as the output signals AX0, AX1, and AY0, respectively, andthe bits LID0 to LID2 of the layer address LID are output as the outputsignals LIDX0, LIDX1, and LIDY0, respectively. When the designationsignal SET shows the 4-bit configuration (4DQ), the bits A14, A15, andA13 of the address signal are output as the output signals AX0, AX1, andAY0, respectively, and the bits LID0 to LID2 of the layer address LIDare output as the output signals LIDX0, LIDX1, and LIDY0, respectively.

Among the output signals that are selected in the above way, signals ofa row address, that is, the signals AX0 to AX2 and LIDX0 to LIDX2 aresupplied to the row address comparing circuit 47 x. The row addresscomparing circuit 47 x has ENOR gate circuits G0 to G2 that compare thecorresponding bits of the output signals and an AND gate circuit G3 thatreceives output signals COMPX0 to COMPX2 of the ENOR gate circuits G0 toG2, and an output of the AND gate circuit G3 is used as the matchingsignal HITX.

Meanwhile, among the output signals from the layer address selectingcircuit 47 a, the signals of the column address, that is, the signalsAY0 and LIDY0 are supplied to the column address comparing circuit 47 ycomposed of an ENOR gate circuit G4. An output signal COMPY0 of the ENORgate circuit G4 is used as the matching signal HITY.

When the designation signal SET shows the 16-bit configuration (16DQ),the output signals AY0 and LIDY0 of the layer address selecting circuit47 a are fixed at the same logical level. Thereby, the matching signalHITY is maintained in an activated state. When the designation signalSET shows the 8-bit configuration (8DQ) or the 4-bit configuration(4DQ), the output signals AX2 and LIDX2 of the layer address selectingcircuit 47 a are fixed at the same logical level. Thereby, the outputsignal COMPX2 is maintained in an activated state.

FIG. 9 is a block diagram showing a configuration of main parts of thecore chip in more detail. FIG. 9 more specifically shows mainly elementsof the control logic 63 directly relevant to the present invention.

As shown in FIG. 9, the control logic 63 includes a command controlcircuit 210. The command control circuit 210 receives an active commandsignal ACT, a precharge command signal PRE, a precharge assignmentsignal A10, and a hit signal HITX, and generates a row command signalPMDBAT and a precharge signal PMDPRE. The precharge signal PMDPREincludes an all-bank precharge signal PMDPRE_ALL that is activated atthe time of precharging all banks, and a bank precharge signalPMDPRE_BANK that is activated at the time of precharging correspondingbanks 0 to 7.

Detailed operations of the command control circuit 210 are as follows.That is, when the active command signal ACT is activated, the commandcontrol circuit 210 activates the row command signal PMDBAT based on acondition that the hit signal HITX is activated. When the prechargecommand signal PRE is activated, the command control circuit 210activates the all-bank precharge signal PMDPRE_ALL when the prechargeassignment signal A10 is at a high level, and activates the bankprecharge signal PMDPRE_BANK when the precharge assignment signal A10 isat a low level.

The bank precharge signal PMDPRE_BANK is supplied to a precharge-bankselection circuit 220 in the control logic 63. The precharge-bankselection circuit 220 activates one of bank precharge signals PMDPRE_0to PMDPRE_7 based on bank assignment signals PDECBA0B to PDECBA7B asoutputs of a bank address decoder 230, when the bank precharge signalPMDPRE_BANK is activated.

The bank address decoder 230 receives three-bit bank address signals BA0to BA2, and decodes these bank addresses. Therefore, only one bit of thebank assignment signals PDECBA0B to PDECBA7B as outputs of the bankaddress decoder 230 is activated based on the bank address signals BA0to BA2.

As shown in FIG. 9, the control logic 63 includes a bank active controlcircuit 240. The bank active control circuit 240 receives the rowcommand signal PMDBAT and the bank assignment signals PDECBA0B toPDECBA7B, and generates bank active signals ACT0 to ACT7. The bankactive signals ACT0 to ACT7 correspond to the internal row command IRCshown in FIG. 4.

The bank active control circuit 240 activates any of the bank activesignals ACT0 to ACT7 corresponding to the bank assignment signalsPDECBA0B to PDECBA7B that are activated, in response to activation ofthe row command signal PMDBAT. As described above, the row commandsignal PMDBAT is generated when both the active command signal ACT andthe hit signal HITX are activated. Therefore, the bank active controlcircuit 240 activates the bank active signals ACT0 to ACT7 assigned bythe bank address signals BA0 to BA2, when chip selection information SELthat is supplied together with the active command signal ACT and thebank address signals BA0 to BA2 matches chip identification informationLID. Consequently, a row access is performed to a bank which is assignedby the bank address signals BA0 to BA2, of the core chip assigned by thechip selection information SEL.

The control logic 63 further includes a bank active register 250. Thebank active register 250 is a circuit that holds activation informationof memory banks assigned by the bank address signals BA0 to BA2 when thechip selection information SEL that is supplied together with the activecommand signal ACT and the bank address signals BA0 to BA2 matches thechip identification information LID. While a circuit configuration ofthe bank active register 250 is described later, the bank activeregister 250 compares the activation information of the memory bankswith the bank address signals BA0 to BA2 that are supplied together withthe column command signal, and activates a hit signal LIDBAHITB when theactivation information matches the bank address signals.

The hit signal LIDBAHITB is supplied to a bank read/write controlcircuit 260 in the control logic 63. The bank read/write control circuit260 receives the hit signal LIDBAHITB, bank assignment signals PDECBA0Bto PDECBA7B, column commands ICMD_C and ICMD_D, and a hit signal HITY,and activates any of read/write control signals R/W0 to R/W7 and any ofdata control signals Data0 to Data7 based on the received signals. Theread/write control signals R/W0 to R/W7 and the data control signalsData0 to Data7 correspond to the internal column command ICC shown inFIG. 4.

Detailed operations of the bank read/write control circuit 260 are asfollows. When the hit signal LIDBAHITB is activated, the bank read/writecontrol circuit 260 activates the read/write control signals R/W0 toR/W7 and the data control signals Data0 to Data7 corresponding to thebank assignment signals PDECBA0B to PDECBA7B, based on a condition thatthe hit signal HITY is activated. The read/write control signals R/W0 toR/W7 are supplied to a circuit block such as a column control circuit62, and are used as a signal that defines a control timing of a columnswitch and the like. Meanwhile, the data control signals Data0 to Data7are supplied to a circuit block such as a data control circuit 54, andare used as a signal that defines an output timing of read data and aninput timing of write data.

FIG. 10 is a circuit diagram of the bank active register 250.

As shown in FIG. 10, the bank active register 250 includes registercircuits 300 to 307 that are provided corresponding to the banks 0 to 7,respectively, and a reset control circuit 310 that resets these registercircuits 300 to 307. Circuit configurations of the register circuits 300to 307 are mutually the same, and therefore only a circuit configurationof the register circuit 300 is shown in FIG. 10.

The register circuit 300 includes tri-state inverters 401 and 402 thatare connected in cascade, an SR latch circuit 403 that is set by anoutput of the tri-state inverter 402, and a NAND gate circuit 415 thatcompares a bank-active flag signal PBAFLGOT as an output of the SR latchcircuit 403 with the bank assignment signal PDECBA0B.

The tri-state inverter 401 has a configuration that has transistors 420,421, 424, and 425 connected in series between power sources VDD and VSS.Gates of the transistors 421 and 424 become input nodes. A correspondingbank assignment signal PDECBA0B is input to the input nodes. The rowcommand signal PMDBAT is supplied to a gate of the transistor 420 viainverters 410 and 411. The row command signal PMDBAT is supplied to agate of the transistor 425 via the inverter 410. An output of thetri-state inverter 401 is supplied to an input node of the tri-stateinverter 402 via the inverter 412.

The tri-state inverter 402 has a configuration that has transistors 418,419, 422, and 423 connected in series between the power sources VDD andVSS. Gates of the transistors 419 and 422 become input nodes. The rowcommand signal PMDBAT is supplied to a gate of the transistor 418 viathe inverter 410. The row command signal PMDBAT is supplied to a gate ofthe transistor 423 via the inverters 410 and 411. An output of thetri-state inverter 402 is supplied to one input node of a NAND gatecircuit 414. The row command signal PMDBAT is supplied to the otherinput node of the NAND gate circuit 414. An output of the NAND gatecircuit 414 is supplied to a set terminal S of the SR latch circuit 403consisting of NAND gate circuits 416 and 417.

With the configuration described above, when the bank assignment signalPDECBA0B is activated at a low level, the SR latch circuit 403 is set inresponse to a rising edge of the row command signal PMDBAT, and a bankactive flag signal PBAFLGOT as an output of the SR latch circuit 403becomes at a high level. The bank active flag signal PBAFLGOT issupplied to one input node of the NAND gate circuit 415. The bankassignment signal PDECBA0B is supplied to the other input node of theNAND gate circuit 415 via the inverter 413.

Therefore, when the bank assignment signal PDECBA0B is activated at alow level again in a state that the SR latch circuit 403 is set, a bankhit signal LIDBAHIT0B as an output of the NAND gate circuit 415 isactivated at a low level. As shown in FIG. 10, bank hit signalsLIDBAHIT0B to LIDBAHIT7B that are output from the register circuits 300to 307, respectively are input to the AND gate circuit 430, and anoutput of the AND gate circuit 430 is used as the hit signal LIDBAHITB.Therefore, when any of the bank hit signals LIDBAHIT0B to LIDBAHIT7B isactivated at a low level, the hit signal LIDBAHITB is also activated ata low level.

The SR latch circuit 403 is set at a starting edge of the row commandsignal PMDBAT. Therefore, the SR latch circuit 403 corresponding to anassigned bank of the core chip that is assigned at a row access time isset. That is, when the chip selection information SEL that is suppliedtogether with the active command signal ACT and the bank address signalsBA0 to BA2 matches the chip identification information LID, the SR latchcircuits 403 assigned by the bank address signals BA0 to BA2 are set.

When the same bank is assigned again at a column access time, the bankassignment signals PDECBA0B to PDECBA7B are activated at a low levelagain, and the hit signal LIDBAHITB is activated. Therefore, even whenthe SR latch circuit 403 included in any of the register circuits 300 to307 is set by a row access, the hit signal LIDBAHITB is not activatedwhen a different bank is assigned at the column access time. The hitsignal LIDBAHITB is activated only when the SR latch circuit 403included in any of the register circuits 300 to 307 is set by a rowaccess and also when the same bank is assigned at a column access timethereafter.

On the other hand, a reset terminal R of the SR latch circuit 403 isconnected to the reset control circuit 310. The reset control circuit310 is configured by eight OR gate circuits 320 to 327 that correspondto the register circuits 300 to 307, respectively. The bank prechargesignals PMDPRE_0 to PMDPRE_7 that correspond to the OR gate circuits 320to 327 are supplied to input nodes at one side of these OR gatecircuits, and the all-bank precharge signal PMDPRE_ALL is supplied toinput nodes of the other side.

With this arrangement, when any of the bank precharge signals PMDPRE_0to PMDPRE_7 is activated, only the SR latch circuit 403 in acorresponding one of the register circuits 300 to 307 is selectivelyreset. On the other hand, when the all-bank precharge signal PMDPRE_ALLis activated, the SR latch circuits 403 in all the register circuits 300to 307 are reset.

FIG. 11 is a timing diagram for explaining an operation of the controllogic 63. In an example shown in FIG. 11, an assignment signal SETassigns a 16-bit configuration (16DQ). Therefore, bits A13 to A15 of anaddress signal are used as chip selection information SEL. That is, FIG.11 shows an example that the chip selection information SEL is fixed ata row access time, and the chip selection information SEL is notsupplied at a column access time.

In the example shown in FIG. 11, the active command signal ACT is issuedfrom outside at times t0 to t7. Values of the chip selection informationSEL that are supplied at the times t0 to t7 are “0” to “7”,respectively. Values of the bank address signals BA0 to BA2 that aresupplied at the times t0 to t7 are “0” to “7”, respectively. Therefore,for example, a row access that assigns a bank 0 of a core chip CC0 isperformed at the time to, and a row access that assigns a bank 1 of acore chip CC1 is performed at the time t1.

In response thereto, the row command signal PMDBAT is activated in thecorresponding core chips CC0 to CC7, respectively. Accordingly, thecorresponding register circuits 300 to 307 are sequentially set in thecore chips CC0 to CC7. For example, the register circuit 300 of the corechip CC0 is set at the time t0, and the register circuit 301 of the corechip CC1 is set at the time t1. FIG. 12 is a schematic diagram forexplaining which one of the register circuits 300 to 307 of which corechip is set, and FIG. 12 shows a state that a hatched portion is set.

In the example shown in FIG. 11, a read command READ is issued fromoutside at a time t8. Values of the bank address signals BA0 to BA2 thatare supplied at the time t8 are “0”. In the present example, because thechip selection information SEL is not supplied at a column access time,it is not possible to determine which chip is assigned by an access froman address signal that is supplied at the column access time. It isclear that an area CA shown in FIG. 12 is an area assigned by a columnaddress which is supplied at the time t8 and that a core chip is notassigned.

However, only the core chip CC0 is a core chip in which the registercircuit 300 corresponding to the bank 0 is set at the time t8.Therefore, the hit signal LIDBAHITB is activated in only the core chipCC0. Consequently, a column access (a read operation) is selectivelyperformed to the bank 0 of the core chip CC0. That is, although a columnaddress does not include information that assigns a core chip, a columnaccess is selectively performed to the core chip CC0 and a column accessis not performed to other core chips CC1 to CC7.

The precharge command signal PRE is issued from outside at a time t9.Although not shown in FIG. 11, the precharge assignment signal A10 atthe time of issuing the precharge command signal PRE is at a low level,and values of the bank address signals BA0 to BA2 are “0”. Consequently,the register circuits 300 of the core chips CC0 to CC7 are selectivelyreset.

As explained above, in the present embodiment, because activationinformation of a bank assigned in a core chip that is assigned at a rowaccess time is held in the bank active register 250, only the bank inthe core chip to be accessed can be selectively activated even when anaddress that is supplied at a column access time does not include thechip selection information SEL.

As explained above, activation information by a row access is not heldin a unit of a bank in each core chip, and can be also held in a unit ofa core chip like in the present embodiment. This method does notgenerate a problem on an access for the following reasons. In a corechip in which chip activation information is in an active state, acolumn access is received regardless of a bank address signal, but acolumn access to a memory bank which is not in an active state becomesinvalid. Consequently, damaging of data or conflict of data does notoccur. However, this invalid column access increases power consumption.On the other hand, when activation information by a row access is heldin a unit of a bank for each core chip like in the present embodiment,an invalid column access as described above is not performed, andwasteful power consumption can be reduced.

According to the semiconductor memory device 10 of the presentembodiment, apart of an address signal for specifying a memory cell isused as the chip selection signal SEL. Therefore, the semiconductormemory device 10 does not require a special signal for performing a chipselection. That is, the controller recognizes this semiconductor memorydevice as a single DRAM that has a memory capacity 8 GB. Because aninterface of the semiconductor memory device is the same as that of aconventional DRAM, compatibility with the conventional DRAM can besecured.

Furthermore, because which bit of an address signal is to be used as thechip selection information SEL is selected corresponding to an I/Oconfiguration, a complex control such as a changing of a pageconfiguration based on an I/O number becomes unnecessary. That is, asshown in FIG. 6, when a 16-bit configuration (=16DQ) is selected, bitsthat are used as row addresses in the core chip are X0 to X12, and allremaining bits X13 to X15 can be allocated to the chip selectioninformation SEL. On the other hand, when an eight-bit configuration(=8DQ) or a four-bit configuration (=4DQ) is selected, the bit X13 isalso used as a row address in the core chip. Therefore, when the chipselection information SEL is allocated in a similar manner to that of a16-bit configuration, a process of changing over a page size from 1 KBto 2 KB becomes necessary. On the other hand, according to thesemiconductor memory device 10 of the present embodiment, thischangeover is not necessary, and a circuit configuration can besimplified.

In the semiconductor memory device 10 according to this embodiment,because the defective chip is skipped in the allocation of the layeraddress LID, the controller recognizes that there is no defective chip.Therefore, even when the defective chip is discovered after an assembly,only the valid partial core chips can be operated without requesting thecontroller to perform the special control.

When the defective chip is discovered after the assembly, it ispreferable to set a valid core chip number as power-of-two byinvalidating the normal chips according to necessity. Specifically, whenthe defective chip number is 1 to 4, the valid core chip number may beset as 4, when the defective chip number is 5 and 6, the valid core chipnumber may be set as 2, and when the defective chip number is 7, thevalid core chip number may be set as 1. According to this configuration,since an address space becomes power-of-two, control of the controlleris facilitated.

FIGS. 13A and 13B are tables illustrating allocation of an addressaccording to the I/O configuration, when the defective chip exists. FIG.13A shows the case where the valid core chip number is 4 (=4 GB) andFIG. 13B shows the case where the valid core chip number is 2 (2 GB).

As shown in FIG. 13A, in the case of the 4 GB configuration using thefour core chips, the row address X15 in the 16-bit configuration (16DQ),the column address Y11 in the 8-bit configuration (8DQ), and the columnaddress Y13 in the 4-bit configuration (4DQ) are not used, as comparedwith the address configuration shown in FIG. 6. In regards to the chipselection information SEL, the same bits as the example shown in FIG. 6are used, except that the bit configuration becomes the 2-bitconfiguration and the most significant bit SEL2 is not used.

As shown in FIG. 13B, in the case of the 2 GB configuration using thetwo core chips, the row addresses X14 and X15 in the 16-bitconfiguration (16DQ), the row address X15 and the column address Yll inthe 8-bit configuration (8DQ), and the row address X15 and the columnaddress Y13 in the 4-bit configuration (4DQ) are not used, as comparedwith the address configuration shown in FIG. 6. In regards to the chipselection information SEL, the same bits as the example shown in FIG. 6are used, except that the bit configuration becomes the 1-bitconfiguration and the upper 2 bits SEL2 and SEL1 are not used.

As such, even when some core chips are not used, the circuitconfiguration of the layer address comparing circuit 47 does not need tobe changed.

FIG. 14 is a diagram showing the configuration of a data processingsystem using the semiconductor memory device 10 according to thisembodiment.

The data processing system shown in FIG. 14 includes a memory module 100and a controller 200 connected to the memory module 100. In the memorymodule 100, the plural semiconductor memory devices 10 are mounted on amodule substrate 101. A register 102 that receives an address signal ora command signal supplied from the controller 200 is mounted on themodule substrate 101, and the address signal or the command signal issupplied to each semiconductor memory device 10 through the register102. The controller 200 supplies row address information including thebank address signals BA0 to BA2 and the chip selection information SELto the memory module 100 at a row access time, and supplies columnaddress information including the bank address signals BA0 to BA2 to thememory module 100 at a column access time.

In the data processing system that has the above configuration, thecontroller 200 may supply only various signals, such as the addresssignals or the command signals, which are needed for an access of acommon DRAM, and does not need to supply a special signal, such as achip selection address, which is not used in the common DRAM.

It is apparent that the present invention is not limited to the aboveembodiments, but may be modified and changed without departing from thescope and spirit of the invention.

For example, in the above described embodiment, the DDR3-type SDRAM isused as the core chip, but the present invention is not limited thereto.Accordingly, the core chip may be a DRAM other than the DDR3-type andmay be a semiconductor memory (SRAM, PRAM, MRAM or flash memory) otherthan the DRAM. All of the core chips do not need to be laminated and allor part of the core chips may be two-dimensionally disposed. The numberof core chips is not restricted to 8.

1. A semiconductor device comprising a plurality of semiconductor chipsstacked each other, each of the semiconductor chips including aplurality of memory banks selectively activated based on a bank addresssignal, the semiconductor chips being connected to each other bypenetration electrodes, wherein the semiconductor chips have mutuallydifferent chip identification information, the semiconductor chipsreceive in common an active command signal, the bank address signal, anda chip selection signal via the penetration electrodes, and each of thesemiconductor chips includes a bank active register that holdsactivation information of a memory bank assigned by the bank addresssignal when the chip selection signal that is supplied together with theactive command signal and the bank address signal matches the chipidentification information.
 2. The semiconductor device as claimed inclaim 1, wherein the semiconductor chips perform a row access to amemory bank assigned by the bank address signal when the chip selectionsignal that is supplied together with the active command signal and thebank address signal matches the chip identification information.
 3. Thesemiconductor device as claimed in claim 2, wherein the semiconductorchips receive in common a column command signal via the penetrationelectrodes, and the semiconductor chips perform a column access to amemory bank assigned by the bank address signal when a memory bank shownby the bank address signal supplied together with the column commandsignal matches a memory bank shown by the activation information that isheld in the bank active register.
 4. The semiconductor device as claimedin claim 1, wherein the semiconductor chips receive in common aprecharge command signal via the penetration electrodes, and the bankactive register is reset in response to the precharge command.
 5. Thesemiconductor device as claimed in claim 4, wherein the semiconductorchips selectively reset activation information of a memory bank assignedby the bank address signal that is supplied together with the prechargecommand signal out of activation information that is held in the bankactive register.
 6. The semiconductor device as claimed in claim 1,further comprising an interface chip that supplies at least the activecommand signal, the bank address signal, and the chip selection signalto the semiconductor chips via the penetration electrodes.
 7. Thesemiconductor device as claimed in claim 6, wherein number of bits ofunit internal data simultaneously input/output between the semiconductorchips and the interface chip is larger than number of bits of unitexternal data simultaneously input/output between the interface chip andoutside.
 8. The semiconductor device as claimed in claim 7, wherein theinterface chip includes a data latch circuit that converts the unitexternal data that is serial into the unit internal data that isparallel, and converts the unit internal data that is parallel into theunit external data that is serial.
 9. The semiconductor device asclaimed in claim 6, wherein the semiconductor chips and the interfacechip are stacked.
 10. A semiconductor device comprising a plurality ofcore chips that can perform a read operation or a write operation byperforming a row access and a column access in this order, and aninterface chip that controls the core chips, wherein each of the corechips includes a plurality of memory banks selectively activated basedon a bank address signal, the core chips have mutually different chipidentification information, the interface chip supplies in common thebank address signal and a chip selection signal to the core chips at therow access time, the interface chip supplies in common the bank addresssignal to the core chips at the column access time, out of the corechips, a core chip of which the chip selection signal supplied at therow access time matches the chip identification information performs arow access to a memory bank assigned by the bank address signal andholds activation information showing the memory bank, and out of thecore chips, a core chip of which a memory bank shown by the bank addresssignal that is supplied at the column access time matches a memory bankshown by the activation information performs a column access to a memorybank assigned by the bank address signal.
 11. The semiconductor deviceas claimed in claim 10, wherein the core chips and the interface chipare stacked, and the core chips are connected in common to the interfacechip via penetration electrodes that is provided in the core chips. 12.The semiconductor device as claimed in claim 10, wherein the interfacechip supplies in common the bank address signal to the core chipswithout supplying the chip selection signal at the column access time.13. The semiconductor device as claimed in claim 10, wherein the chipselection signal is configured by a plurality of bits, and the interfacechip supplies in common a part of bits of the chip selection signal tothe core chips at the row access time, and supplies in common remainingbits of the chip selection signal to the core chips at the column accesstime. 14.-16. (canceled)
 17. A semiconductor device comprising: a firstchip and a plurality of second chips stacked with one another; the firstchip making an access to one or ones of the second chips, each of thesecond chips including a plurality of memory banks and a plurality ofbank active register circuits provided correspondingly to the memorybanks, and each of the bank active register circuits taking a firststate when a corresponding one of the memory banks is in an accessiblecondition and a second state when the corresponding one of the memorybanks is in an inaccessible condition.
 18. The semiconductor device asclaimed in claim 17, wherein the first chip makes the access with bankaddress information, a data read or write operation triggered by theaccess being performed on at least one of the memory banks that isdesignated by the bank address information and is provided with thecorresponding active register circuit taking the first state.
 19. Thesemiconductor device as claimed in claim 18, wherein the data read orwrite operation triggered by the access is ignored on another of thememory banks that is designated by the bank address information and isprovided with the corresponding active register circuit taking thesecond state.
 20. The semiconductor device as claimed in claim 17,wherein the second chips share a plurality of penetration electrodeseach penetrating the plurality of second chips and the access istransferred via corresponding one or ones of the penetration electrodes.21. The semiconductor device as claimed in claim 17, wherein the firstchip makes an another access to one or ones of the second chips withanother bank address information and chip select information so that oneof the memory banks designated by the another bank address informationin one of the second chips designated by the chip select information isaccessed and one of the active register circuits corresponding to theone of the memory banks takes the first state.